Mathad, G. S.
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Copper Interconnects, New Contact Metal- Lurgies, & Low-k Dielectrics
Pattern Transfer In Integrated Circuit Fabrication
Stategic Performance Measures For State Departments Of Transportation, A Handbook For Ceos And Executives (nchrp No. 20-24 (20))
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes (Proceedings / Electrochemical Society)
Proceedings of the Tenth Symposium on Plasma Processing
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